Download Ken Goldberg's SPIE 2011 Presentation on AIT5. [19 MB]

K. A. Goldberg, I. Mochi, S. B. Rekawa, N. S. Smith, J. B. Macdougall, P. P. Naulleau,
"An EUV Fresnel zoneplate mask-imaging microscope for lithography generations
reaching 8 nm," Proc. SPIE 7969, 796910 (2011). Download Paper Here.

 

 

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